Photoresist Chemicals 1-Azetidineacetamide, N-[4-[[2-[[2-fluoro-5-(1-methylethyl)phenyl]amino]-1-methyl-1H-benzimid azol-5-yl]oxy]-2-pyridinyl]- Cas：850710-60-0 Molecular Formula：C27H29FN6O2