Photoresist Chemicals 1-Piperazinecarboxylic acid, 4-[2-[[4-[[(Z)-(6-chloro-1,2-dihydro-2-oxo-3H-indol-3-ylidene)phenylmeth yl]amino]phenyl](1-methylethyl)amino]-2-oxoethyl]-, 1,1-dimethylethyl ester Cas:652136-22-6 Molecular Formula:C35H40ClN5O4