Photoresist Chemicals 1-Piperazinecarboxylic acid, 4-[[3-fluoro-5-[[[(6-methyl-3-pyridinyl)amino]carbonyl]amino]phenyl]meth yl]-2-(methoxymethyl)-, methyl ester, (2S)- Cas:873698-34-1 Molecular Formula:C22H28FN5O4