Photoresist Chemicals 1-Piperidinecarboxylic acid, 4-[[(2-chloro-4-pyrimidinyl)[(2,3-dihydro-5-benzofuranyl)carbonyl]amino] methyl]-, 1,1-dimethylethyl ester Cas:849751-87-7 Molecular Formula:C24H29ClN4O4