Photoresist Chemicals 1-Piperidinecarboxylic acid, 4-[[3-[3-fluoro-4-(methoxycarbonyl)phenyl]-1,2,4-oxadiazol-5-yl]methoxy] -, 1,1-dimethylethyl ester Cas：918965-60-3 Molecular Formula：C21H26FN3O6