Photoresist Chemicals 1-Piperidinecarboxylic acid, 4-[4-[5-amino-6-[(1R)-1-(2,6-dichloro-3-fluorophenyl)ethoxy]pyrazinyl]-1 H-pyrazol-1-yl]-, 1,1-dimethylethyl ester Cas:877399-63-8 Molecular Formula:C25H29Cl2FN6O3