Photoresist Chemicals 1-Piperidinecarboxylic acid, 4-[[5-[4-(1,2,3-thiadiazol-4-yl)phenyl]-1,2,4-oxadiazol-3-yl]methoxy]-, 1,1-dimethylethyl ester Cas:918965-69-2 Molecular Formula:C21H25N5O4S