Photoresist Chemicals 1-Piperidinecarboxylic acid, 4-[[5-(4-chlorofuro[3,2-c]pyridin-2-yl)-1,2,4-oxadiazol-3-yl]methoxy]-, 1,1-dimethylethyl ester Cas:895125-49-2 Molecular Formula:C20H23ClN4O5