Photoresist Chemicals 1-Propanone, 1-[2-[hydroxy[(4R)-4-methyl-2-oxido-1,3,2-dioxaphospholan-2-yl]methyl] benzo[b]thien-5-yl]-3-(5-methyl-2-phenyl-4-thiazolyl)- Cas:848935-51-3 Molecular Formula:C25H24NO5PS2