Photoresist Chemicals 1-Propanone, 2,3,3,3-tetrafluoro-2-[[2,3,5,5,6-pentafluoro-3,6-bis(trifluoromethyl)-1,4- dioxan-2-yl]oxy]-1-phenyl- Cas:61097-86-7 Molecular Formula:C15H5F15O4