Photoresist Chemicals 1-Pyrrolidinecarboxylic acid, 4-fluoro-2-[(5-methyl-1,3,4-oxadiazol-2-yl)carbonyl]-, 1,1-dimethylethyl ester, (2S,4S)- Cas：851028-86-9 Molecular Formula：C13H18FN3O4