Photoresist Chemicals 1(2H)-Phthalazinone, 5-[[(1R,2S,4Z)-4-ethylidene-6-fluoro-1,2,3,4-tetrahydro-2,5-dihydroxy-2- (trifluoromethyl)-1-naphthalenyl]amino]-2-methyl-, rel- Cas:879337-49-2 Molecular Formula:C22H19F4N3O3