Photoresist Chemicals 1(2H)-Pyridinecarboxylic acid, 3,4-dihydro-2-(1H-indol-2-yl)-4-oxo-5-[tris(1-methylethyl)silyl]-, (1R,2S)-2-(1-methyl-1-phenylethyl)cyclohexyl ester, (2S)-rel- Cas:685568-31-4 Molecular Formula:C38H52N2O3Si