Photoresist Chemicals 1,3,5-Triazin-2(1H)-one, 1-(2-chloro-6-fluorobenzoyl)tetrahydro-5-methyl-3-[2-methyl-4-[(trifluoro methyl)thio]phenyl]- Cas:596850-10-1 Molecular Formula:C19H16ClF4N3O2S