Photoresist Chemicals 1,4,7,10-Tetraazacyclododecane-1,4,7-tricarboxylic acid, 10-[2-[(2-methoxy-2-oxoethyl)amino]-2-oxoethyl]-, tris(1,1-dimethylethyl) ester Cas:848761-21-7 Molecular Formula:C28H51N5O9