Photoresist Chemicals 1H-1,4-Diazepine, 1-acetyl-4-[6-[5-amino-3-[[4-[[[(1,1-dimethylethyl)amino]carbonyl]amino] phenyl]amino]-1H-1,2,4-triazol-1-yl]-4-pyrimidinyl]hexahydro- Cas:880174-39-0 Molecular Formula:C24H33N11O2