Photoresist Chemicals 1H-1,4-Diazepine, 1-[(acetyloxy)acetyl]-4-[4-[[7-[(2,5-difluorophenyl)methyl]-7H-pyrrolo[2,3- d]pyrimidin-2-yl]amino]benzoyl]hexahydro- Cas:909559-07-5 Molecular Formula:C29H28F2N6O4