Photoresist Chemicals 1H-2,1,3-Benzothiadiazine-1-carboxylic acid, 3,4-dihydro-3-(1-methylethyl)-4-oxo-, 4-(2,4-dichlorobenzoyl)-1,3-dimethyl-1H-pyrazol-5-yl ester, 2,2-dioxide Cas:96163-57-4 Molecular Formula:C23H20Cl2N4O6S