Photoresist Chemicals 1H-Benzimidazole-7-carboxylic acid, 6-fluoro-2-[[(1R)-1-(5-methyl-2-furanyl)propyl]amino]-, 2,2,2-trifluoroacetate (1:1) Cas：921221-94-5 Molecular Formula：C16H16FN3O3.C2HF3O2