Photoresist Chemicals 1H-Inden-1-one, 2,3-dihydro-5-[[2-(3-pyridinyl)thieno[2,3-c]pyridin-3-yl]amino]-, O-[(1,1-dimethylethyl)dimethylsilyl]oxime Cas:927806-41-5 Molecular Formula:C27H30N4OSSi