Photoresist Chemicals 1H-Indene-5-carboxylic acid, 1-[[[5-[[[(4-fluoro-3-methylphenyl)methyl]amino]carbonyl][1,2,4]triazolo[1, 5-a]pyrimidin-7-yl]carbonyl]amino]-2,3-dihydro-4-methyl-, 1,1-dimethylethyl ester, (1S)- Cas:916207-18-6 Molecular Formula:C30H31FN6O4