Photoresist Chemicals 1H-Indole-1-acetic acid, 3-[2-[[2-(4-chlorophenyl)-4-thiazolyl]methyl]-2,3-dihydro-1,1-dioxido-1,2- benzisothiazol-3-yl]- Cas:881170-30-5 Molecular Formula:C27H20ClN3O4S2