Photoresist Chemicals 1H-Purine-2,6-dione, 7-[[5-[(diethylamino)methyl]-1,2,4-oxadiazol-3-yl]methyl]-3,7-dihydro-1,3 -dimethyl-, monohydrochloride Cas：88338-67-4 Molecular Formula：C15H21N7O3.ClH