Photoresist Chemicals 1H-Pyrazole-4-carboxamide, 5-amino-1-(1,1-dimethylethyl)-3-[4-[[[[5-(1,1-dimethylethyl)-3-isoxazolyl] amino]carbonyl]amino]phenyl]- Cas:594983-73-0 Molecular Formula:C22H29N7O3