Photoresist Chemicals 1H-Pyrazolo[4,3-d]pyrimidin-7-amine, N-(4-chloro-2-fluorophenyl)-1-ethyl-3-methyl-5-[4-[(tetrahydro-2H-pyran- 4-yl)amino]-1-piperidinyl]- Cas:928766-56-7 Molecular Formula:C24H31ClFN7O