Photoresist Chemicals 1H-Pyrrole-1-carboxamide, 4-(5-chloro-2-fluorophenyl)-N-(3-fluorohexahydro-1-methyl-1H-azepin-4- yl)-2,5-dihydro-2-(hydroxymethyl)-N-methyl-2-phenyl-, (2S)- Cas:847029-88-3 Molecular Formula:C26H30ClF2N3O2