Photoresist Chemicals (1R,3aR,4aR,8aR,9S,9aR)-1-methyl-3-oxodecahydro-3H-spiro[naphtho[2,3-c]furan-6,2′-[1,3]dioxolane]-9-carboxylic acid Cas:900161-13-9 Molecular Formula:C16H22O6