Photoresist Chemicals 2-chloro-5-(1-hydroxy-3-oxo-2H-isoindol-1-yl)benzenesulfonamide; 3,5-diamino-6-chloro-N-(diaminomethylidene)pyrazine-2-carboxamide Cas：93281-22-2 Molecular Formula：C20H19Cl2N9O5S