Photoresist Chemicals 2-Heptenoic acid, 6-[(4S)-2,2-dimethyl-1,3-dioxolan-4-yl]-5-[[tris(1-methylethyl)silyl]oxy]-, methyl ester, (2Z,5S,6S)- Cas：842141-81-5 Molecular Formula：C22H42O5Si