Photoresist Chemicals 2-Oxazolidinone, 3-[(2S,3R)-7-[[(1,1-dimethylethyl)diphenylsilyl]oxy]-2-methyl-1-oxo-3-[(tri ethylsilyl)oxy]heptyl]-4-(phenylmethyl)-, (4S)- Cas:929298-20-4 Molecular Formula:C40H57NO5Si2