Photoresist Chemicals 2-Oxazolidinone, 3-[4-[4-[[[(1,1-dimethylethyl)dimethylsilyl]oxy]methyl]-1H-imidazol-1-yl]-3- fluorophenyl]-5-[(4-methyl-1H-1,2,3-triazol-1-yl)methyl]-, (5R)- Cas:591232-44-9 Molecular Formula:C23H31FN6O3Si