Photoresist Chemicals 2-Oxazolidinone, 5-(aminomethyl)-3-[3,5-difluoro-4-[4-(1H-1,2,3-triazol-1-yl)-1-piperidinyl] phenyl]-, (5S)- Cas:928160-75-2 Molecular Formula:C17H20F2N6O2