Photoresist Chemicals 2-Piperazinecarboxylic acid, 4-(3-chlorophenyl)-1-[3-(3-oxo-1,2,4-triazolo[4,3-a]pyridin-2(3H)-yl)prop yl]-, propyl ester, ethanedioate (1:1) Cas:581777-98-2 Molecular Formula:C23H28ClN5O3.C2H2O4