Photoresist Chemicals 2-Propenoic acid, 3-[(2R,3S)-3-[[(1,1-dimethylethyl)dimethylsilyl]oxy]tetrahydro-6-methoxy- 2H-pyran-2-yl]-, ethyl ester, (2E)- Cas:807616-69-9 Molecular Formula:C17H32O5Si