Photoresist Chemicals 2-Propenoic acid, 3-[3-[(cyclohexylcarbonyl)[[4-[3-(1,1-dimethylethoxy)-3-oxo-1-propenyl]- 2-[[2-(trimethylsilyl)ethoxy]methoxy]phenyl]methyl]amino]phenyl]-, methyl ester Cas:698363-74-5 Molecular Formula:C37H51NO7Si