Photoresist Chemicals 2-Thia-3,5-diaza-4-phosphaheptan-7-oic acid, 3,5-dimethyl-4-[(1-methylpropyl)thio]-6-oxo-, 1-methylpropyl ester, 2,2,4-trioxide Cas：93502-37-5 Molecular Formula：C13H27N2O6PS2