Photoresist Chemicals 2-Thia-3,5-diaza-4-phosphaheptan-7-oic acid, 3,5-dimethyl-4-[(1-methylpropyl)thio]-6-oxo-, 2-chloroethyl ester, 2,2,4-trioxide Cas：93502-38-6 Molecular Formula：C11H22ClN2O6PS2