Photoresist Chemicals 2(3H)-Furanone, dihydro-5-[[(1R,2S,5R)-5-methyl-2-(1-methylethyl)cyclohexyl]oxy]-4-[(4- methyl-2-thiazolyl)amino]-, (4R,5R)- Cas：866422-66-4 Molecular Formula：C18H28N2O3S