Photoresist Chemicals 2,6,12,15-Tetraazaoctadecanoic acid, 8-hydroxy-10,17-dimethyl-13-(1-methylethyl)-7-(2-methylpropyl)-4-[[[(4- methyl-2-thiazolyl)methoxy]carbonyl]amino]-5,11,14-trioxo-, (3S)-tetrahydro-3-furanyl es Cas:881009-07-0 Molecular Formula:C33H56N6O9S