Photoresist Chemicals 2H-1,4-Benzothiazin-3(4H)-one, 6-[[2-[(3-chloro-4-methoxyphenyl)amino]-5-fluoro-4-pyrimidinyl]amino]-2 ,2-dimethyl-, 1,1-dioxide Cas：841289-36-9 Molecular Formula：C21H19ClFN5O4S