Photoresist Chemicals 2H-1,4-Benzoxazin-3(4H)-one, 6-[[2-[(1,2-dimethyl-1H-benzimidazol-5-yl)amino]-5-fluoro-4-pyrimidinyl] amino]-2-methyl-, (2S)- Cas：841291-75-6 Molecular Formula：C22H20FN7O2