Photoresist Chemicals 2H-1,4-Benzoxazin-3(4H)-one, 6-[[5-fluoro-2-[(1-methyl-1H-indazol-6-yl)amino]-4-pyrimidinyl]amino]-2, 2-dimethyl-, monohydrochloride Cas:841291-27-8 Molecular Formula:C22H20FN7O2.ClH