Photoresist Chemicals 2H-Indol-2-one, 5-fluoro-1,3-dihydro-3-[5-[(3-hydroxy-1-piperidinyl)methyl]-3,3-dimethyl- 1(3H)-isobenzofuranylidene]- Cas:872615-63-9 Molecular Formula:C24H25FN2O3