Photoresist Chemicals 3-Oxazolidinecarboxylic acid, 2-[(1R)-1-[[(1,1-dimethylethyl)diphenylsilyl]oxy]-4-oxo-7-(phenylmethoxy) heptyl]-4-phenyl-, 1,1-dimethylethyl ester, (2R,4R)- Cas:600143-35-9 Molecular Formula:C44H55NO6Si