Photoresist Chemicals 3-Pyridinecarboxamide, 4-[[2-fluoro-4-(methylsulfinyl)phenyl]amino]-1,6-dihydro-N-[2-hydroxy-1-( hydroxymethyl)ethyl]-1-methyl-6-oxo- Cas：821791-71-3 Molecular Formula：C17H20FN3O5S