Photoresist Chemicals 3-Pyrrolidinamine, N-[(2-chloro-4-fluorophenyl)methyl]-N-[(3R)-tetrahydro-3-furanyl]-, (3S)-, (2R,3R)-2,3-dihydroxybutanedioate Cas:820984-74-5 Molecular Formula:C15H20ClFN2O.xC4H6O6