Photoresist Chemicals 3,6-Diazabicyclo[3.2.0]heptane, 3-(5,6-dichloro-3-pyridinyl)-, (1S,5S)-, 2-hydroxy-1,2,3-propanetricarboxylate (1:1) Cas:876068-52-9 Molecular Formula:C10H11Cl2N3.C6H8O7