Photoresist Chemicals 3H-5,8b-Etheno-1H-furo[3,4-e]isoindole-4-carboxylic acid, 3a,4,5,5a,6,7,8,8a-octahydro-1,6,8-trioxo-7-phenyl-, methyl ester Cas：96600-67-8 Molecular Formula：C20H17NO6