Photoresist Chemicals 4-Isothiazolecarboxylic acid, 5-[[[[4-[ethyl(2-hydroxyethyl)amino]butyl]amino]carbonyl]amino]-3-[(2,3,6 -trifluoro-4-methylphenyl)methoxy]-, methyl ester Cas:878477-91-9 Molecular Formula:C22H29F3N4O5S