Photoresist Chemicals 4-Isoxazolesulfonamide, N-[[trans-3-[2-chloro-3-(1-pyrrolidinylmethyl)phenoxy]cyclobutyl]methyl]- N,3,5-trimethyl-, 2,2,2-trifluoroacetate (1: ) Cas:917818-56-5 Molecular Formula:C22H30ClN3O4S.xC2HF3O2